Furnace technology
We are qualified and produce for all well-known OEM partners
WONIK Quartz Europe (WQE) is qualified by all major OEM partners for their equiments.
- ASM
- Aviza
- BTI
- Centrotherm
- Kokusai
- LPE
- Mattson
- Tokyo Electron
We prefer working with clear and opaque quartz glass provided by Momentive (GE) and Heraeus.
All customer needs in the horizontal and vertical furnace technology are manufactured by WQE according to technical drawings. Starting with the production of ampules at 4”, it extends to horizontal and vertical furnaces with 6” batch-systems and up to a high-end 12” furnace.
Made in Germany
Concerning the production of horizontal and vertical process tubes, liners, boats, caps, pedestals, torch chambers, injectors and every other component of oven technology, we take “Made in Germany” very seriously.
Continuous innovation
In order to keep up with the demand of innovation and high quality quartz glass products, we are, of course, continuously improving our production process in close cooperation with our customers.
Furnace technology
Ampoules 2“-4“
Typical products
- Ampoules / stoppers
- Disc carrier
- Substrate carrier
Batch horizontally 4“-8“
Manufacturer
- Kokusai Electric (BTU, BTI)
- Centrotherm
- SEMCO Engineering
- Tempress
- Thermco
- Andere
Typical products
- Process pipes
- Liners
- Boats
- Carrier
- Paddles
- Flat ground caps
- Baffles
- Ground joints
- Injectors
Batch vertical 6“-12“
Manufacturer
- TEL
- ASM
- ASML
- Kokusai Electric
- Koyo Lindberg
Typical products
- Processtubes
- CVD Tubes
- ATM Tubes
- Carriers
- Holderboats
- Ringboats
- Fin Pedestals
- Tube Pedestals
- Caps
- Cap Covers
- Manifold Covers
- Plate Holders
- Shutter Plates
- Dust Covers
- Doors
- Exhaust Rings
- Suspension Rings
- Adapter Plates
- Heat Shields
- Exhaust / Inlet Tubes
- Sleeves
- Torch Chambers
- Balloons
- TC-Tubes
- Injectors / Nozzles
Certifications
WONIK Quartz Europe produces all parts in the semiconductor industry
Being part of a first-class corporate organisation we are a globally leading manufacturer and supplier of quartz glass components for the semiconductor and microelectronics industry.