Furnace technology

We are qualified and produce for all well-known OEM partners

WONIK Quartz Europe (WQE) is qualified by all major OEM partners for their equiments.

  • ASM
  • Aviza
  • BTI
  • Centrotherm
  • Kokusai
  • LPE
  • Mattson
  • Tokyo Electron

We prefer working with clear and opaque quartz glass provided by Momentive (GE) and Heraeus.

All customer needs in the horizontal and vertical furnace technology are manufactured by WQE according to technical drawings. Starting with the production of ampules at 4”, it extends to horizontal and vertical furnaces with 6” batch-systems and up to a high-end 12” furnace.

Made in Germany

Concerning the production of horizontal and vertical process tubes, liners, boats, caps, pedestals, torch chambers, injectors and every other component of oven technology, we take “Made in Germany” very seriously.

Continuous innovation

In order to keep up with the demand of innovation and high quality quartz glass products, we are, of course, continuously improving our production process in close cooperation with our customers.

Furnace technology

Ampoules 2“-4“

Typical products
  • Ampoules / stoppers
  • Disc carrier
  • Substrate carrier

Batch horizontally 4“-8“

  • Kokusai Electric (BTU, BTI)
  • Centrotherm
  • SEMCO Engineering
  • Tempress
  • Thermco
  • Andere
Typical products
  • Process pipes
  • Liners
  • Boats
  • Carrier
  • Paddles
  • Flat ground caps
  • Baffles
  • Ground joints
  • Injectors

Batch vertical 6“-12“

  • TEL
  • ASM
  • ASML
  • Kokusai Electric
  • Koyo Lindberg
Typical products
  • Processtubes
  • CVD Tubes
  • ATM Tubes
  • Carriers
  • Holderboats
  • Ringboats
  • Fin Pedestals
  • Tube Pedestals
  • Caps
  • Cap Covers
  • Manifold Covers
  • Plate Holders
  • Shutter Plates
  • Dust Covers
  • Doors
  • Exhaust Rings
  • Suspension Rings
  • Adapter Plates
  • Heat Shields
  • Exhaust / Inlet Tubes
  • Sleeves
  • Torch Chambers
  • Balloons
  • TC-Tubes
  • Injectors / Nozzles


WONIK Quartz Europe produces all parts in the semiconductor industry

Being part of a first-class corporate organisation we are a globally leading manufacturer and supplier of quartz glass components for the semiconductor and microelectronics industry.


The satisfaction and trust of our customers are among the most important corporate goals. We rely on our certified integrated management system for this.

Other advantages

Belonging to the WONIK Group not only brings advantages to WQE through the constant exchange of knowledge, but also guarantees security of supply for our customers through the branches around the world.